Updated on 2023/12/01

写真a

 
MINETA Takashi
 
Title
Professor

Research Areas

  • Informatics / Mechanics and mechatronics

  • Nanotechnology/Materials / Nano/micro-systems

  • Life Science / Biomedical engineering

  • Informatics / Robotics and intelligent system

  • Life Science / Biomaterials

  • Life Science / Biomedical engineering

  • Informatics / Mechanics and mechatronics

  • Informatics / Robotics and intelligent system

  • Nanotechnology/Materials / Nanomaterials

  • Nanotechnology/Materials / Nano/micro-systems

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Papers

  • Fabrication of Tactile Display Mechanism Using Arrayed SMA Thick Film Actuator and Si TSV Layer with Individually Connecting Diode(特集 第37回「センサ・マイクロマシンと応用システム」シンポジウム受賞論文), 電気学会論文誌E(センサ・マイクロマシン部門誌), 141(7) 260-264, 2021

    Saito Ryo, Kimura Yusuke, Xu Jiale, Mineta Takashi

    Single Author

  • Fabrication Process of Embedded Silicon Microchannel and Nozzle Structure for Liquid-delivering Atomic Force Microscopy Probe , SENSORS AND MATERIALS, 31(2) 595-605, 2019

    Hong Jinseo, Masuda Yusuke, Miura Yoshitaka, Shibata Takayuki, Mineta Takashi

    Multiple Authorship (Only Japanese)

  • Micro-Robotic Medical Tools Employing SMA Actuators for Use in the Human Body, Journal of Robotics and Mechatronics, 34(6) 1233-1244, 2022.12

    Haga Yoichi, Mineta Takashi, Matsunaga Tadao, Tsuruoka Noriko

    Single Author

  • Fabrication of Tactile Display Using Arrayed SMA Film Actuator on Silicon TSV Substrate with Individually Conducting Diode, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2021-January 709-711, 2021.01

    Ryo Saito, Yusuke Kimura, Jiale Xu, Takashi Mineta

    Single Author

  • Characterization of Thermal Imprinting and Releasing of Resins using Micro-multi-fin Structured MEMS Mold for Structural Color Expression, Journal of The Surface Finishing Society of Japan, 72(3) 170-175, 2021

    YAHAGI Toru, YAMADA Naoya, MURAYAMA Hiroki, KATO Mutsuto, WATANABE Yoshiyuki, ITO Hiroshi, MINETA Takashi

    Single Author

  • Fabrication of MEMS mold with inclined micro-multi-fin structure and shape transfer to resin by thermal imprint process, JAPANESE JOURNAL OF APPLIED PHYSICS, 59(SI) , 2020.06

    Yahagi T., Murayama H., Watanabe Y., Mineta T.

    Multiple Authorship (Only Japanese)

  • Fabrication and characterization of SMA film actuator array with bias spring for high-power MEMS tactile display, MICROELECTRONIC ENGINEERING, 227 , 2020.04

    Xu Jiale, Kimura Yusuke, Tsuji Kazuki, Abe Konomu, Shimizu Tomomi, Hasegawa Hiroyasu, Mineta Takashi

    Multiple Authorship (Only Japanese)

  • PDMS Soft Skin Device with Deformable Micro-Diaphragm Array Fabricated with Rapid Substrate-Releasing Process, JOURNAL OF ROBOTICS AND MECHATRONICS, 32(2) 289-296, 2020.04

    Mitsui Hideyuki, Kashiwazaki Hiroshi, Mineta Takashi

    Multiple Authorship (Only Japanese)

  • Preface to the special issue on "the awarded papers of the 36th sensor symposium", IEEJ Transactions on Sensors and Micromachines, 140(7) 150-151, 2020

    Hiroaki Suzuki, Takashi Mineta

    Single Author

  • Fabrication of tactile display using arrayed SMA thick film actuator with individually connecting diode on Si TSV layer, The Proceedings of Mechanical Engineering Congress, Japan, 2020(0) J13116, 2020

    Ryo SAITO, Yusuke KIMURA, Jiale XU, Takashi MINETA

    Single Author

  • Special Issue on MEMS for Robotics and Mechatronics, Journal of Robotics and Mechatronics, 32(2) 279-280, 2020

    Esashi Masayoshi, Tanaka Shuji, Aoyagi Seiji, Mineta Takashi, Suzumori Koichi, Dohi Tetsuji, Miki Norihisa

    Single Author

  • PDMS Soft Skin Device with Deformable Micro-Diaphragm Array Fabricated with Rapid Substrate-Releasing Process, Journal of Robotics and Mechatronics, 32(2) 289-296, 2020

    Mitsui Hideyuki, Kashiwazaki Hiroshi, Mineta Takashi

    Single Author

  • Preface to the Special Issue on "Selected Papers in The Technical Meetings on Sensors and Micromachines 2018", IEEJ Transactions on Sensors and Micromachines, 139(5) 87, 2019

    Ohta Jun, Mineta Takashi

    Single Author

  • Preface to the Special Issue on "World State-of-the-art Research on Sensors and Micromachines", IEEJ Transactions on Sensors and Micromachines, 139(1) 1, 2019

    Mineta Takashi

    Single Author

  • Fabrication and Characterization of an Arrayed Shape Memory Alloy Thick Film Actuator Device for Planar Tactile Displays (特集 センサ・マイクロマシン英文特集号), 電気学会論文誌. E, センサ・マイクロマシン部門誌, 139(1) 15-20, 2019

    Yanatori Hiroshi, Tsuji Kazuki, Abe Konomu, Iwasaki Kenji, Mineta Takashi

    Single Author

  • Evaluation of Tactile Sensation using Periodic Si Micro-bump Arrayed Surface with Various Bump Sizes, IEEJ Transactions on Sensors and Micromachines, 139(12) 393-399, 2019

    Xu Jiale, Nonomura Yoshimune, Mineta Takashi

    Multiple Authorship (Only Japanese)

  • Fabrication of Tactile Display Device with Individually-driven-type Shape Memory Alloy Thick Film Actuator Array, IEEJ Transactions on Sensors and Micromachines, 139(9) 329-334, 2019

    Kimura Yusuke, Tsuji Kazuki, Yanatori Hiroshi, Abe Konomu, Iwasaki Kenji, Mineta Takashi

    Multiple Authorship (Only Japanese)

  • Resonant-type MEMS Magnetic Sensor with FePd Magneto-strictive and PZT Piezo-electric Films, IEEJ Transactions on Sensors and Micromachines, 139(11) 383-384, 2019

    Okada Naoki, Suzuki Koudai, Mineta Takashi

    Multiple Authorship (Only Japanese)

  • Preface to the special issue on “Selected papers in the technical meetings on sensors and micromachines 2018”, IEEJ Transactions on Sensors and Micromachines, 139(5) 87, 2019

    Jun Ohta, Takashi Mineta

    Single Author

  • MEMS Magnetic Sensor with Bridge-Type Resonator and Magnetostrictive Thin Film, Electronics and Communications in Japan, 101(3) 90-95, 2018.03

    Naoki Okada, Takashi Sasabuchi, Kunihiro Koike, Takashi Mineta

    Single Author

  • Fabrication of nano-pillar and mushroom structure on PDMS diaphragm for movable concavo-convex hydrophobic device, The Proceedings of the Materials and processing conference, 2018(0) 926, 2018

    MURAKAMI Yuji, MITUI Hideyuki, SATOU Tubasa, MINETA Takasi

    Single Author

  • Fabrication and Stiffness Evaluation of Ni Thin Film Flat-type Spring with Micro-pin and Frame Structure for Tactile Display Device, The Proceedings of the Materials and processing conference, 2018(0) 925, 2018

    TSUJI Kazuki, ABE Konomu, SHIMIZU Tomomi, HASEGAWA Hiroyasu, MINETA Takashi

    Single Author

  • Fabrication of a switchable dual AFM cantilever through a large deflection using magneto-strictive film, IEEJ Transactions on Sensors and Micromachines, 138(9) 412-416, 2018

    Jinseo Hong, Kazuki Mishina, Takashi Mineta

    Single Author

  • Fabrication of a 3D nano-printing device, Proceedings of SPIE - The International Society for Optical Engineering, 10597 , 2018

    Jinseo Hong, Yusuke Masuda, Takashi Mineta

    Single Author

  • Fabrication and characterization of tactile display with arrayed SU8 micro-structure on shape memory alloy thick film actuator, Proc. 34th Sensor Symp., (01-pm4) PS142-01-PS142-04, 2017.11

    Takashi Mineta,, Kazuki Tsuji, Hiroshi Yanatori, Kenta Hiyoshi, Yasuhiro Ono, Konomu Abe

    Multiple Authorship (Only Japanese)

  • Fabrication of switchable dual AFM cantilever with large displacement using magneto-strictive film, Proc. 34th Sensor Symp., (31am3) PS39-01-PS39-04, 2017.10

    Jinseo Hong, Kazuki Mishina, Takashi Mineta

    Multiple Authorship (Only Japanese)

  • MEMS Magnetic Sensor with Bridge-type Resonator and Magneto-strictive thin film, IEEJ Trans.on Sensors and Micromachines, 137(8) 234-238, 2017.08

    Naoki Okada, akashi Sasabuchi, Kunihiro Koike, Takashi Mineta

    Multiple Authorship (Only Japanese)

  • Tactile Display MEMS Device with SU8 Micro-pin and Spring on SMA Film Actuator Array, 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), 2017.06

    Takashi Mineta, Hiroshi Yanatori, Kenta Hiyoshi, Kazuki Tsuji, Yasuhiro Ono, Konomu Abe

    Multiple Authorship (Including Foreigners)

  • Fabrication and characterization of dual AFM probe with narrow-gapped silicon tips and switchable cantilevers with magneto-strictive FePd film actuator, Microelectronic Engineering, 168 45-49, 2017.01

    Takashi Mineta, Kenta Kawashima, Ryoga Taguchi

    Multiple Authorship (Including Foreigners)

  • Evaluation of tactile sensation and friction using periodic micro-structure of etched silicon surface , IEEJ Trans.on Sensors and Micromachines, 136(10) 432-436, 2016.10

    Jiale Xu,Yoshimune Nonomura, Takashi Mineta

    Multiple Authorship (Only Japanese)

  • MEMS Magnetic Sensor with Bridge-type Resonator and Magneto-strictive Thin film, Proc. 33th Sensor Symp., 2016.10

    Naoki Okada, takashi Sasabuchi, Kunihiro Koikei, Takashi Mineta

    Multiple Authorship (Only Japanese)

  • Fabrication and dynamic wettability characterization of transparent PDMS device with deformable micro-bump array, Proc. 33th Sensor Symp., 2016.10

    Hideyuki Mitsui, Takashi Mineta

    Multiple Authorship (Only Japanese)

  • Evaluation of annealing effect on sputtered FePd magnetostrictive Film Using MEMS Cantilever, IEEJ Trans.on Sensors and Micromachines, 136(9) 408-412, 2016.09

    Takashi Sasabuchi, Naoki Okada, Tsubasa Sato, Kunihiro Koike, takashi Mineta

    Multiple Authorship (Only Japanese)

  • Si nano-tip sharping and fabrication of narrow-gapped dual AFM probe, IEEJ Transactions on Sensors and Micromachines, 136(7) 312-318, 2016.07

    Kazuki Mishina, Yoshitaka Miura, Kenta Kawashima, Tsubasa Sato, Takashi Mineta

    Multiple Authorship (Only Japanese)

  • Formation process of apatite layer on titanium-coated silicon wafer surfaces, J. Ceramic Soc. Jpn, 124(6) 753-756, 2016.06

    (18) Haruna Sawaguchi, Jiale Xu, Takahiro Kawai, Takashi Mineta and Yoshimune Nonomura

    Multiple Authorship (Including Foreigners)

  • Fabrication of micro-channel and nozzle in narrow-gapped AFM dual Si probe, Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2016), 2016.06

    Yoshitaka Miura, Jin-seo Hong, Kazuki Mishina, Takayuki Shibata, Takashi Mineta

    Multiple Authorship (Including Foreigners)

  • MEMS Magnetic Sensor with Bridge-type Resonator and Magneto-strictive thin film, Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2016), 2016.06

    (17) Takashi Sasabuchi, Naoki Okada, Kunihiro Koike, Takashi Mineta

    Multiple Authorship (Including Foreigners)

  • A Shape Memory Alloy Thick Film Actuator Array for Narrow Pitched Planar Tactile Display Device, IEEE-NEMS 2016, 2016.04

    H. Yanatori, T. Mineta, S. Takeuchi, K. Abe

    Multiple Authorship (Including Foreigners)

  • Dual-AFM Probes as An Imaging and In-situ Molecular Operation Tool, IEEE-NEMS 2016, 2016.04

    Jinseo Hong, Ikuko Kakizaki, Hideharu Sugo, Takashi Mineta

    Single Author

  • Aminosilane patterning on substrate surface by PDMS soft stamp for proteoglycan molecular immobilization, IEEE-NEMS 2016, 2016.04

    Jinseo Hong, Ikuko Kakizaki, Hideharu Sugo, Takashi Mineta

    Multiple Authorship (Including Foreigners)

  • Shape memory alloy thick film micro-actuator array for MEMS tactile display device, 25th Annual Meet.of MRS-Japan, 2015.12

    H. Yanatori, T. Mineta

    Multiple Authorship (Including Foreigners)

  • Annealing Effect on FePd Magneto-strictive Film on Si MEMS Cantilever, 25th Annual Meet.of MRS-Japan, 2015.12

    T. Sasabuchi , N. Okada , T. Satoh, K. Koike, T. Mineta

    Multiple Authorship (Including Foreigners)

  • Self-Align Fabrication of Narrow-Gapped Dual AFM Tip Using Si Trench Refilling, Trans. Electronics and Communications in Jpn., 98(12) 30-36, 2015.12

    KENTA KAWASHIMA,TAKASHI MINETA,EIJI MAKINO,TAKAHIRO KAWASHIMA,TAKAYUKI SHIBATA

    Multiple Authorship (Including Foreigners)

  • Force and torque sensing of cherry picking motion, 2015.10

    Ayaka NISHIZAWA, Takashi MINETA, Shyogo SATO, Yuya SUZUKI,Narumi SASAKI, YUICHI TSUMAKI, Shin KUDO

    Multiple Authorship (Only Japanese)

  • Aminosilane patterning on substrate surface by PDMS soft stamp and proteoglycan molecular immobilization, 2015.10

    Jinseo Hong, Ikuko Kakizaki, Hideharu Sugo, Takashi Mineta

    Multiple Authorship (Only Japanese)

  • Evaluation of tactile sensation and friction using periodic micro-structure of etched silicon surface , Proc. 32th Sensor Symp., 2015.10

    Jiale Xu,Yoshimune Nonomura, Takashi Mineta

    Multiple Authorship (Only Japanese)

  • Reversible actuation micro gripper with thick SMA film for bio-sheet handing, IEEJ Trans.on Sensors and Micromachines, 136(10) 454-459, 2015.10

    Ryo Sato, Takahiro Kamada, Takashi Mineta

    Multiple Authorship (Only Japanese)

  • Fabrication and characterization of dual AFM cantilever with narrow-gapped dual silicon tip and FePd magneto-strictive alloy film actuator, Proc. 6th Micor Nano Symp., 2015.10

    Takashi Mineta,Kenta Kawashima, Ryoga Taguchi

    Multiple Authorship (Only Japanese)

  • Si nano-tip sharpening and fabrication of narrow-gapped dual AFM probe, Proc. 32th Sensor Symp., 2015.10

    Multiple Authorship (Only Japanese)

  • Evaluation of annealing effect on sputtered FePd magnetostrictive Film Using MEMS Cantilever , Proc. 32th Sensor Symp., 2015.10

    Takashi Sasabuchi, Naoki Okada, Tsubasa Sato, Kunihiro Koike, takashi Mineta

    Multiple Authorship (Only Japanese)

  • Reversible actuation micro gripper with thick SMA film for bio-sheet handing, Proc. 32th Sensor Symp., 2015.10

    Ryo Sato, Takahiro Kamada, Takashi Mineta

    Multiple Authorship (Only Japanese)

  • Development of Tactile Display Using Shape Memory Alloy Thick Film Actuator Array, Proc. 32th Sensor Symp., 2015.10

    Hiroshi Yanatori, Takashi Mineta

    Multiple Authorship (Only Japanese)

  • Fabrication of deformable micro-pillar-array device and dynamic wettability characterization, Proc. 31th Sensor Symp., 2014.10

    Multiple Authorship (Only Japanese)

  • Capacitive Micromachined Ultrasonic Transducers Using Anodically Bondable Ceramic Wafer withTrough-wafer Via, Trans. IEEJ, 134(10) 333-337, 2014.10

    Multiple Authorship (Only Japanese)

  • Dual AFM probe for imaging and in-situ mechanical operation, IEEE Int. Nano Electronics Conf. (INEC), 2014.07

    (9) T. Mineta

    Single Author

  • Characterization of Environmental-driven Thermal Buckling Actuator for an Asteroid Exploration Rover, Int. Symp.on Artificial Intelligence, Robotics and Automation in Space (i-SAIRAS), 2014.06

    T. Mineta, A. Sugai, R. Kazama, Y. Tsumaki,

    Multiple Authorship (Including Foreigners)

  • SelfSelfSelf -align fabrication of n align fabrication of n align fabrication of nalign fabrication of n align fabrication of n align fabrication of n align fabrication of n align fabrication of n align fabrication of nalign fabrication of n align fabrication of nalign fabrication of n arrow arrow-gapped gapped gapped gapped gapped dual AFM tip using Si tdual AFM tip using Si tdual AFM tip using Si t dual AFM tip using Si tdual AFM tip using Si t dual AFM tip using Si tdual AFM tip using Si t dual AFM tip using Si tdual AFM tip using Si tdual AFM tip using Si t dual AFM tip using Si tdual AFM , Trans IEEJ, 134(4) 90-95, 2014.04

    Multiple Authorship (Only Japanese)

  • Fabrication of narrow-gapped dual Si AFM tips by mechanically polishing-back for selective trench sidewalls protection, Trans IEEJ, 134(4) 74-78, 2014.04

    Kenta Kawashima, Eji Makino, Takashi Mineta

    Multiple Authorship (Including Foreigners)

  • Biochemical and atomic force microscopy characterization 1 of salmon nasal cartilage proteoglycan, Carbohydrate Polymers, 103 538-549, 2014

    (19) Ikuko Kakizaki, Takashi Mineta, Mana Sasaki, Yota Tatara, Eiji Makino, Yoji Kato

    Single Author

  • SelfSelfSelf -align fabrication of n align fabrication of n align fabrication of nalign fabrication of n align fabrication of n align fabrication of n align fabrication of n align fabrication of n align fabrication of nalign fabrication of n align fabrication of nalign fabrication of n arrow arrow-gapped gapped gapped gapped gapped dual AFM tip using Si tdual AFM tip using Si tdual AFM tip using Si t dual AFM tip using Si tdual AFM tip using Si t dual AFM tip using Si tdual AFM tip using Si t dual AFM tip using Si tdual AFM tip using Si tdual AFM tip using Si t dual AFM tip using Si tdual AFM , Proc. 30th Sensor Symp., 2013.10

    Multiple Authorship (Only Japanese)

  • abrication of wettability switching device with deformable micro-pillar-array surface, Proc. 30th Sensor Symp., 2013.10

    Multiple Authorship (Only Japanese)

  • Capacitive Micromachined Ultrasonic Transducers Using Anodically Bondable Ceramic Wafer withTrough-wafer Via, Proc. 30th Sensor Symp., 2013.10

    Multiple Authorship (Only Japanese)

  • Fabrication of ultra-narrow-gapped dual AFM tip and silicon dual cantilever with magneto-strictive thin film actuator, 39th Int. Conf. on Micro Nano Eng, 2013.09

    K. Kawashima, T. Okazaki, Y. Furuya, E. Makino, T. Mineta,

    Multiple Authorship (Including Foreigners)

  • Novel Approach for Intracellular Delivery of Biomolecules Using Bioprobe Integrated with Hollow Nanoneedle, 39th Int. Conf. on Micro Nano Eng, 2013.09

    T. Shibata, M. Banno, Y. Ito, M. Nagai, T. Kawashima, T. Mineta, E. Makino

    Multiple Authorship (Including Foreigners)

  • Fabrication of deformable PDMS surface for surface wettability control”, 39th Int. Conf. on Micro Nano Eng, 2013.09

    T. Mineta, T. Nagasawa, H. Kashiwazaki, S. Kobayashi

    Multiple Authorship (Including Foreigners)

  • Shape Memory Alloy Tubular Micro-torsion-actuator with Co-axial Bias Mechanism, IEEJ Transactions on Sensors and Micromachines, 133(7) 297-302, 2013.07

    Multiple Authorship (Only Japanese)

  • Development of environmental temperature driven buckling actuator for an asteroid exploration rover, 3rd Int. Conf. on Asia Arab Sustainable Energy Forum (AASEF 2013), 2013.05

    A. Sugai, Y. Tsumaki, R. Tadakuma, T. Mineta

    Multiple Authorship (Including Foreigners)

  • MEMS sensors and actuators with smart materials, 3rd Int. Conf. on Asia Arab Sustainable Energy Forum (AASEF 2013), 2013.05

    T. Mineta

    Single Author

  • Fabrication of FePd / Si MEMS cantilever for high sensitive magnetic sensor, Proc. 29th Sensor Symp., 2012.10

    Multiple Authorship (Only Japanese)

  • Shape Memory Alloy Tubular Micro-torsion-actuator with Co-axial Bias Mechanism, Proc. 29th Sensor Symp., 2012.10

    Multiple Authorship (Only Japanese)

  • Fabrication of narrow-gapped dual tip with trench reflow and surface polishing process, Proc. 29th Sensor Symp., 2012.10

    Multiple Authorship (Only Japanese)

  • MEMS devices for bio-medical applications, nt. Workshop on Progress of Materials for Smart System, 2012.04

    T. Mineta

    Single Author

  • Fabrication and Characterization of Silicon MEMS Cantilever with FePd Ferromagnetic Shape Memory Alloy Film, Int. Workshop on Piezoelectric Materials and Applications , 2012.04

    (19) Takashi Mineta, Yusuke Sado, Eiji Makino, Teiko Okazaki and Yasubumi Furuya

    Multiple Authorship (Including Foreigners)

  • Environment-driven rover for asteroid exploration, Int. Symp.on Artificial Intelligence, Robotics and Automation in Space (i-SAIRAS), 2012

    Y. Tsumaki, T. Akaike, T. Mineta, R. Tadakuma

    Multiple Authorship (Including Foreigners)

  • Fabrication of cylindrical micro actuator by etching of TiNiCu shape memory alloy tube, Sensors and Actuators A, 2011.09

    (33) Takashi Mineta, Tomoe Deguchi, Eiji Makino, Takahiro Kawashima, Takayuki Shibata

    Multiple Authorship (Including Foreigners)

  • Effects of Microstructure Geometry and Plasma Modification on Wetting Properties of SU-8 Surface, Microelectronic Engineering, 88(8) 1775-1778, 2011.08

    (35) Seiya Kobayashi, Eiji Makino, Takashi Mineta, Tomohiro Komatsuzaki

    Multiple Authorship (Including Foreigners)

  • Accurate and Simple Assembly Process of Shape Memory Alloy Tubular Micro Manipulator with a Bias Mechanism, Microelectronic Engineering, 88 2683-2686, 2011.08

    (34) Takashi Mineta, Shinya Kudoh, Eiji Makino, Takahiro Kawashima, Takayuki Shibata

    Multiple Authorship (Including Foreigners)

  • Sphincter actuator fabricated with PDMS/SMA bimorph cantilevers, Microelectronic Engineering, 88 2662-2665, 2011.06

    E. Makino, T. Mineta, T. Mitsunaga, T. Kawashima, T. Shibata,

    Multiple Authorship (Including Foreigners)

  • Effects of Dimension of Micro Pillar Array and Plasma Modification on Wetting Properties of SU-8 Surface for Water Droplet, J. Surface Finishing Soc. Jpn., 62(3) 40-44, 2011.03

    Multiple Authorship (Only Japanese)

  • Trapping of Hyaluronic Acid Molecule by Metal Coated Silicon Nano- tweezers, J. of Micro/Nano-lithography, MEMS, and MOEMS, 9(3) 031004-1-031004-5, 2010.09

    T. Mineta, H. Takeuchi, E. Makino, G. Hashiguchi,

    Multiple Authorship (Including Foreigners)

  • Trapping of Hyaluronic Acid Molecules on Sharp Nano-Electrodes of Various Metals, Microelectronic Engineering,, 87(5-8) 738-741, 2010.08

    H. Takeuchi, T. Mineta, E. Makino

    Multiple Authorship (Including Foreigners)

  • Feasibility study on cellular network analysis with patterned cell culture microdevice, Microelectronic Engineering, 87(5-8) 704-707, 2010.08

    (5) T. Kawashima, T. Kimura, T. Shibata, A. Kishida, T. Mineta, E. Makino

    Multiple Authorship (Including Foreigners)

  • Micromachining of a newly designed AFM probe integrated with hollow microneedle for cellular function analysis, Microelectronic Engineering , 87(5-8) 1185-1189, 2010.08

    (4) Norihisa Kato, Takahiro Kawashima, Takayuki Shibata, Takashi Mineta, Eiji Makino

    Multiple Authorship (Including Foreigners)

  • Trapping of Hyaluronic Acid Molecule by Metal Coated Silicon Nano-tweezers, Proc. 3th IEEE-Nanomed, 2009.10

    (20) Hiroko Takeuchi, Takashi Mineta, Eiji Makino, Gen Hashiguchi

    Multiple Authorship (Including Foreigners)

  • Fabrication of novel silicon dual AFM tip with narrow gap, J. Micro/Nanolithography, MEMS, and MOEMS , 8(2) 021117-1-021117-5, 2009.06

    (16) S. Morita, T. Mineta, E. Makino, A. Umino, T. Kawashima, T. Shibata

    Multiple Authorship (Including Foreigners)

  • Fabrication of micromanipulator array for cell patterning, Microelectronic Engineering, 86(4-6) 1439-1442, 2009.06

    (17) Takayuki Shibata, Shinji Yamanaka, Norihisa Kato, Takahiro Kawashima, Mitsuyoshi Nomura, Takashi Mineta, Eiji Makino

    Multiple Authorship (Including Foreigners)

  • Heating And Actuation Characteristics of Shape Memory Thin Film Actuator for Blood Vessel Holding, Tech. Dig. of the 14th Int. Conf. on Solid State Sensors, Actuators and Microsystems (Transuducers’09), 1770-1773, 2009.06

    (24) M. Ozaki, N. Kida, T. Mineta, E. Makino, S. Toh, T. Kawashima, T. Shibata

    Multiple Authorship (Including Foreigners)

  • Flash-Evaporated TiNiCu Thick Film for Shape Memory Alloy Micro Actuator, Microelectronic Engineering, 86(4-6) 1274-1277, 2009.06

    (18) Takashi Mineta, Kouji Kasai, Yuki Sasaki, Eiji Makino, Takahiro Kawashima, Takayuki Shibata

    Multiple Authorship (Including Foreigners)

  • Wet Abrasive Blasting Process for Smooth Micromachining of Glass by Ductile-mode Removal, J. Micromechanics and Microengineering, 19 015031-1 -015031-8 , 2009.01

    (19) Takashi Mineta, Takehisa Takada, Eiji Makino, Takahiro Kawashima, Takayuki Shibata

    Multiple Authorship (Including Foreigners)

  • Micromachining of electroformed nickel mold using thick photoresist microstructure for imprint technology, Microsystem Technology, 14(9-11) 1359-1365, 2008.11

    (33) Takayuki Shibata, Yoichi Takahashi, Takahiro Kawashima, Toshio Kubota, Mamoru Mita, Takashi Mineta, Eiji Makino

    Multiple Authorship (Including Foreigners)

  • Thermal Type Blood Flow Sensor on Titanium Micro Needle, Sensors and Materials, 20(7) 341-349, 2008.10

    akashi Mineta, Yuki Tanahashi, Eiji Makino, Satoshi Toh, Takahiro Kawashima, Takayuki Shibata

    Multiple Authorship (Including Foreigners)

  • Pulsation Sensor Integrated with Microvascular Holding Actuator for Thrombosis Monitoring, Sensors and Actuators A, 143(1) 14-19, 2008.05

    (35) T. Mineta, N. Kida, S. Nomura, E. Makino, T. Sugawara, S. Toh, T. Shibata

    Multiple Authorship (Including Foreigners)

display all >>

Books

  • MEMS materials and Process Handbook, Springer , 2011.06

    (32) T. Mineta, Y. Haga

  • Multifunctional Active Catheter, Wiley-VCH, 2000.11

    Y. Haga, T. Mineta, M. Esashi

Review Papers

  • Special Issue on MEMS for Robotics and Mechatronics, JOURNAL OF ROBOTICS AND MECHATRONICS, 32(2) 279-280, 2020.04

    Esashi Masayoshi, Tanaka Shuji, Aoyagi Seiji, Mineta Takashi, Suzumori Koichi, Dohi Tetsuji, Miki Norihisa

  • Preface to the Special Issue on "The Awarded Papers of The 36th Sensor Symposium", The Institute of Electrical Engineers of Japan, IEEJ Transactions on Sensors and Micromachines, 140(7) 150-151, 2020

    Suzuki Hiroaki, Mineta Takashi

  • Fabrication of multi-fin structure using MEMS process and shape transfer to resin materials, Institute of Electrical Engineers of Japan, 35 4p, 2018.10

Grant-in-Aid for Scientific Research

  • Grant-in-Aid for Scientific Research(B),2022.04 -

  • Grant-in-Aid for Scientific Research(B),2018.04 - 2022.03

  • Grant-in-Aid for Scientific Research(B),2015.04 - 2018.03

  • Grant-in-Aid for Scientific Research(B),2011.04 - 2014.03

  • Grant-in-Aid for Scientific Research(B),2023.04 - 2024.03

Other external funds procured

  • Magneto-strictive-driven dual AFM probe for narrow-gapped delivery in liquid,2015.04 - 2018.03,Magneto-strictive-driven dual AFM probe for narrow-gapped delivery in liquid

    Multi-atomic force microscopic (AFM) probe with imaging and other functions have been expected as molecular operation tools, in particular in biology research field. In this research, novel fabrication process technologies of sub-μm-gapped dual Si AFM probe with hollow-structure was established. Large deflectable twin cantilevers with high quality magneto-strictive thin film actuator was also developed for the function of dual cantilever switching.

    Japan Society for the Promotion of Science

Presentations

  • 39th Sensor Symposium, Domestic presentation, 2022.11, Oral presentation (general)

  • 39th Sensor Symposium, Domestic presentation, 2022.11, Oral presentation (general)

  • 39th Sensor Symposium, Domestic presentation, 2022.11, Poster presentation

  • Asia-Pacific Conference of Transducers and Micro-Nano Technology 2022 , International presentation, 2022.05 - 2022.06, Oral presentation (general)

  • Asia-Pacific Conference of Transducers and Micro-Nano Technology 2022 , International presentation, 2022.05 - 2022.06, Oral presentation (general)

  • Asia-Pacific Conference of Transducers and Micro-Nano Technology 2022 , International presentation, 2022.05 - 2022.06, Oral presentation (general)

  • 38th Sensor Symposium, Domestic presentation, 2021.11, Oral presentation (general)

  • 38th Sensor Symposium, Domestic presentation, 2021.11, Oral presentation (general)

  • 9th Int. Conf. on Smart Sys. Eng. 2021, International presentation, 2021.10, Oral presentation (general)

  • 9th Int. Conf. on Smart Sys. Eng. 2021, International presentation, 2021.10, Oral presentation (general)

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