Updated on 2023/11/21

写真a

 
TSURU Toshihide
 
Title
Professor

Research Areas

  • Nanotechnology/Materials / Optical engineering and photon science

  • Nanotechnology/Materials / Thin film/surface and interfacial physical properties

Academic Society Affiliations

  • The Japan Society of Applied Physics

  • Optical Society of Japan

 

Papers

  • Fabrication of optical pinholes and its application to light diffraction experiments, (18) 87-94, 2023.03

    Masabumi Seya, Toshihide Tsuru

    Multiple Authorship (Only Japanese)

  • Cr/Sc/Mo multilayer for condenser optics in water window microscopes, J. Electron Spectrosc. Relat. Phenom., 220 14-16, 2017.01

    T. Hatano, T. Ejima, T. Tsuru

    Multiple Authorship (Including Foreigners)

  • Multilayer coated grazing incidence condenser for large numerical aperture objective at wavelength of 4.5 nm, Applied Optics, 53 6846-6852, 2014.10

    T. Ejima, T. Hatano, K. Ohno, T. Fukayama, S. Aihara, M. Yanagihara, T. Tsuru

    Multiple Authorship (Including Foreigners)

  • Three-dimensional shape measurements by imaging ellipsometry, 35 300-305, 2014.06

    Multiple Authorship (Only Japanese)

  • Reflection double slit for multilayer reflection phase measurements, Photon Factory Activity Report 2013 Part B, 31 358, 2014.01

    T. Hatano, T. Tsuru

    Multiple Authorship (Including Foreigners)

  • Performance of the post-focusing mirror system at the reflectometry beamline BL-11D of the Photon Factory, J. Phys.: Conf. Ser., 463 012010-4, 2013.10

    T. Hatano, S. Aihara, K. Uchida and T. Tsuru

    Multiple Authorship (Including Foreigners)

  • Homogenized ion milling over the whole area of EUV spherical multilayer mirrors for reflection phase error correction, J. Phys.: Conf. Ser., 425 152009-4, 2013.03

    T. Tsuru, K. Arai and T. Hatano

    Multiple Authorship (Including Foreigners)

  • Tilt-ellipsometry of object surface by specular reflection for three-dimensional shape measurement, Opt. Express, 21(5) 6625-6632, 2013.03

    Toshihide Tsuru

    Single Author

  • Multilayer reflectance loss after ion milling, Photon Factory Activity Report 2012 Part B, 30 363, 2013.01

    Y. Sakai, T. Tsuru, T. Harada, T. Hatano

    Multiple Authorship (Including Foreigners)

  • Development of an automatic null ellipsometer for sputtering rate monitoring of EUV multilayer fabrication, Photon Factory Activity Report 2010 Part B, 28 309, 2012.01

    T. Tsuru, T. Tsutou, T. Hatano and M. Yamamoto

    Multiple Authorship (Including Foreigners)

  • Three-dimensionally controlled ion milling for reflection phase manipulation of EUV multilayer mirrors, AIP Conf. Proc., 1365 180-183, 2011.10

    T. Tsuru, T. Hatano, M. Yamamoto

    Multiple Authorship (Including Foreigners)

  • Development of spectroscopic transmission-type four detector polarimeter, Thin Solid Films, 519 2707-2710, 2011.02

    T. Tsuru, Y. Kubota, T. Tadokoro, S. Kawabata

    Multiple Authorship (Including Foreigners)

  • Development of wide ion beam profile measurement method for a period-by-period extreme ultraviolet multilayer milling system, Jpn. J. Appl. Phys., 49 126601-1-7, 2010.12

    A. Tosaka, Y. Sakai, T. Tsuru, M. Yamamoto

    Multiple Authorship (Including Foreigners)

  • Area-selected ion milling for reflection wavefront error correction of soft X-ray multilayer mirrors, AIP Conf. Proc., 1234 772-775, 2010.09

    T. Tsuru, Y. Sakai, T. Hatano and M. Yamamoto

    Multiple Authorship (Including Foreigners)

  • High throughput and wide field of view EUV microscope for blur-free one-shot imaging of living organisms, Opt. Express, 18 7203-7209, 2010.03

    T. Ejima, F. Ishida, H. Murata, M. Toyoda, T. Harada, T. Tsuru, T. Hatano, M. Yanagihara

    Multiple Authorship (Including Foreigners)

  • Development of a period-by-period EUV multilayer milling system for the final nm figure error correction by 0.1 nm per period, J. Phys.: Conf. Ser. (IOP), 186 012077-3, 2009.09

    T. Tsuru, A. Tosaka, Y. Sakai and M.Yamamoto

    Multiple Authorship (Including Foreigners)

  • Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering, Vacuum, 84 19-25, 2009.08

    P. Siffalovic, E. Majkova, L. Chitu, M. Jergel, S. Luby, J. Keckes, G. Maier, A. Timmann, S.V. Roth, T. Tsuru, T. Harada, M. Yamamoto

    Multiple Authorship (Including Foreigners)

  • Multilayer polarization elements and their applications to polarimetric studies in vacuum ultraviolet and soft X-ray regions, Nuc. Sci. Tech., 19 193-203, 2008.08

    M. Watanabe, T. Hatano, K. Saito, W. Hu, T. Ejima, T. Tsuru, M. Takahashi, H. Kimura, T. Hirono, Z. Wang, M. Cui, M. Yamamoto, M. Yanagihara

    Multiple Authorship (Including Foreigners)

  • Multi-bits coding by multi-directional valley pits permitting stamper mass-production and remote direction readout by polarization reflection, Opt. Express, 16 9622-9627, 2008.06

    T. Tsuru, M. Yamamoto

    Multiple Authorship (Including Foreigners)

  • Precise determination of layer structure with EUV ellipsometry data obtained by multilayer polarizing elements, Phys. Stat. Sol. (c), 5 1129-1132, 2008.05

    T. Tsuru and M.Yamamoto

    Multiple Authorship (Including Foreigners)

  • Advanced nanometer-size structures,Design and in-situ fabrication control of X-EUV mirrors, Acta Phys. Slov., 57 911-1074, 2007.12

    E. Majkova, M. Jergel, M. Yamamoto, T. Tsuru, S. Luby, P. Siffalovi

    Multiple Authorship (Including Foreigners)

  • Compact ellipsometer employing a static polarimeter module with arrayed polarizer and wave-plate elements, Appl. Opt., 46 4963-4967, 2007.08

    T. Sato, T. Araki, Y. Sasaki, T. Tsuru, T. Tadokoro, S. Kawakami

    Multiple Authorship (Including Foreigners)

  • Reflection Passband Broadening by Aperiodic Designs of EUV/Soft X-ray Multilayers, AIP, Conf. Proc., 879 1524-1527, 2007.01

    T. Tsuru

    Single Author

  • In-situ ellipsometric monitor with layer-by-layer analysis for precise thickness control of EUV multilayer optics, Thin Solid Films, 515 947-951, 2006.11

    T. Tsuru and M. Yamamoto

    Multiple Authorship (Including Foreigners)

  • Investigation of soft X-ray multilayer mirror mabrication by an in-situ ellipsometric deposition monitor, IPAP Conference Series, 7 168-170, 2006.07

    T. Tsuru, T. Harada and M. Yamamoto

    Multiple Authorship (Including Foreigners)

  • Accurate measurement of EUV multilayer period thicknesses by in situ automatic ellipsometry, J. Electron. Spectrosc. Relat. Phenom., 144-147 1083-1085, 2005.06

    T. Tsuru, T. Tsutou, T. Hatano and M. Yamamoto

    Multiple Authorship (Including Foreigners)

  • Schwarzschild microscope in vacuum ultraviolet and soft X-ray regions, Nuc. Sci. Tech. , 16 129-138, 2005.06

    M. Watanabe, M. Yanagihara, T. Ejima, M. Toyoda, Y. Kondo, T. Hatano, T. Tsuru and M. Yamamoto

    Multiple Authorship (Including Foreigners)

  • Realtime layer-by-layer analysis for multilayer fabrication monitoring by an automatic null ellipsometer, Thin Solid Films, 455-456 705-709, 2004.05

    T. Tsuru, T. Tsutou and M. Yamamoto

    Multiple Authorship (Including Foreigners)

  • Normal incidence reflectometry of concave multilayer mirrors using synchrotron radiation to evaluate the period thickness distribution, AIP Conf. Proc., 705 839-842, 2004.05

    T. Hatano, S. Kubota, Y. Adachi, T. Tsuru and M. Yamamoto

    Multiple Authorship (Including Foreigners)

  • Thickness monitoring of nm period EUV multilayer fabrication by ellipsometry, AIP Conf. Proc., 705 732-735, 2004.05

    T. Tsuru, T. Tsutou, T. Hatano and M. Yamamoto

    Multiple Authorship (Including Foreigners)

  • Nanopipes in undoped AlGaN epilayers, J. Cryst. Growth, 229 58-62, 2001.07

    J. Kang, S. Tsunekawa, B. Shen, Z. Mai, C. Wang, T. Tsuru and A. Kasuya

    Multiple Authorship (Including Foreigners)

  • Measurement of stress near dislocation walls in a ZnSe single crystal by Raman scattering tomography, Jpn. J. Appl. Phys., 39 5977-5980, 2000.10

    T. Tsuru, K. Sakai, M. Ma and T. Ogawa

    Multiple Authorship (Including Foreigners)

  • Study on defects in CZ-Si crystals grown by normal, cusp magnetic field and electromagnetic field techniques using multi-chroic infrared light scattering tomography, J. Cryst. Growth, 218 232-238, 2000.09

    M. Ma, T. Irisawa, T. Tsuru, T. Ogawa, M. Watanabe and M. Eguchi

    Multiple Authorship (Including Foreigners)

  • Defects in flux and Czochralski grown β-BaB2O4 crystals observed by light scattering tomography, J. Cryst. Growth, 216 352-358, 2000.06

    T. Tsuru and T. Ogawa

    Multiple Authorship (Including Foreigners)

  • Relation between light scattered intensity and Raman shift in neighborhood of dislocation walls in ZnSe crystals, J. Cryst. Growth, 210 234-237, 2000.03

    Y. Yukawa, T. Tsuru, K. Sakai and T. Ogawa

    Multiple Authorship (Including Foreigners)

  • Observation of defects in a C3N4/Diamond/Si structure by infrared light scattering tomography, J. Phys. Condens. Matter., 11 L191-L197, 1999.05

    M. Ma, T. Tsuru, T. Ogawa and Z. Mai

    Multiple Authorship (Including Foreigners)

  • Defects observed by a highly intensified laser beam and growth rate of light scattering tomographic defects at 1000℃, Proc. of the 3rd Symp. on Atomic-scale Surface and Interface Dynamics, 205-209, 1999.03

    T. Ogawa, M. Ma, N. Nango, K. Shinoki and T. Tsuru

    Multiple Authorship (Including Foreigners)

  • Thermal treatment of ZnSe crystals studied by light scattering and photoluminescence tomography, Inst. Phys. Conf Ser., 149 103-107, 1996.05

    T. Tsuru and T. Ogawa

    Multiple Authorship (Including Foreigners)

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Books

  • Compendium of Surface and Interface Analysis, Springer, Singapore, 2018.02

    Toshihide Tsuru et al., The Surface Science Society of Japan ed.

Grant-in-Aid for Scientific Research

  • Grant-in-Aid for challenging Exploratory Research,2016.04 - 2019.03

  • Grant-in-Aid for Scientific Research(C),2013.04 - 2016.03

  • Grant-in-Aid for Young Scientists(B),2011.04 - 2013.03

  • Grant-in-Aid for Young Scientists(B),2008.04 - 2010.03

  • Grant-in-Aid for Young Scientists(B),2004.04 - 2006.03

  • Grant-in-Aid for Specially Promoted Research,2003.04 - 2007.03

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Academic Activity

  • 応用物理学会 分科会 日本光学会 偏光計測・制御技術研究グループ, 2010.04 - 2014.09

  • 日本光学会 偏光計測・制御技術研究グループ, 2014.12 -

  • The Japan Society of Applied Physics, 2019.04 -

Academic Activities

  • 山形県高等学校文化連盟科学専門部研究発表会審査員,2021.01

  • 山形県高等学校探究型学習課題研究発表会審査員,2020.12

  • 山形県立山形東高等学校山東探究塾Ⅱ課題研究審査員,2019.07 -

  • 山形県立東桜学館高等学校課題研究発表会審査員,2019.07 - 2020.03

  • 山形市理科教育センター運営委員,2017.04 -

  • 科学の甲子園ジュニア山形県大会実行委員,2014.07 -

  • 科学の甲子園山形県大会実行委員,2014.07 -

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