Personnel Information


MINETA Takashi



Research Areas 【 display / non-display

  • Informatics / Mechanics and mechatronics

  • Nanotechnology/Materials / Nano/micro-systems

  • Life Science / Biomedical engineering

  • Informatics / Robotics and intelligent system


Papers 【 display / non-display

  • Characterization of Thermal Imprinting and Releasing of Resins using Micro-multi-fin Structured MEMS Mold for Structural Color Expression, Journal of The Surface Finishing Society of Japan, 72(3) 170-175, 2021

    YAHAGI Toru, YAMADA Naoya, MURAYAMA Hiroki, KATO Mutsuto, WATANABE Yoshiyuki, ITO Hiroshi, MINETA Takashi

    Single Author

  • Fabrication of Tactile Display Mechanism Using Arrayed SMA Thick Film Actuator and Si TSV Layer with Individually Connecting Diode(特集 第37回「センサ・マイクロマシンと応用システム」シンポジウム受賞論文), 電気学会論文誌E(センサ・マイクロマシン部門誌), 141(7) 260-264, 2021

    Saito Ryo, Kimura Yusuke, Xu Jiale, Mineta Takashi

    Single Author

  • Fabrication of Tactile Display Using Arrayed SMA Film Actuator on Silicon TSV Substrate with Individually Conducting Diode, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2021-January 709-711, 2021.01

    Ryo Saito, Yusuke Kimura, Jiale Xu, Takashi Mineta

    Single Author

  • Fabrication of MEMS mold with inclined micro-multi-fin structure and shape transfer to resin by thermal imprint process, JAPANESE JOURNAL OF APPLIED PHYSICS, 59(SI) , 2020.06

    Yahagi T., Murayama H., Watanabe Y., Mineta T.

    Multiple Authorship (Only Japanese)

  • Fabrication and characterization of SMA film actuator array with bias spring for high-power MEMS tactile display, MICROELECTRONIC ENGINEERING, 227 , 2020.04

    Xu Jiale, Kimura Yusuke, Tsuji Kazuki, Abe Konomu, Shimizu Tomomi, Hasegawa Hiroyasu, Mineta Takashi

    Multiple Authorship (Only Japanese)

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Books 【 display / non-display

  • MEMS materials and Process Handbook, Springer , 2011.06

    (32) T. Mineta, Y. Haga

  • Multifunctional Active Catheter, Wiley-VCH, 2000.11

    Y. Haga, T. Mineta, M. Esashi

Review Papers 【 display / non-display

  • Special Issue on MEMS for Robotics and Mechatronics, JOURNAL OF ROBOTICS AND MECHATRONICS, 32(2) 279-280, 2020.04

    Esashi Masayoshi, Tanaka Shuji, Aoyagi Seiji, Mineta Takashi, Suzumori Koichi, Dohi Tetsuji, Miki Norihisa

  • Preface to the Special Issue on "The Awarded Papers of The 36th Sensor Symposium", The Institute of Electrical Engineers of Japan, IEEJ Transactions on Sensors and Micromachines, 140(7) 150-151, 2020

    Suzuki Hiroaki, Mineta Takashi

  • Fabrication of multi-fin structure using MEMS process and shape transfer to resin materials, Institute of Electrical Engineers of Japan, 35 4p, 2018.10

Grant-in-Aid for Scientific Research 【 display / non-display

  • Grant-in-Aid for Scientific Research(B),2018.04 -

  • Grant-in-Aid for Scientific Research(B),2018.04 - 2021.03

  • Grant-in-Aid for Scientific Research(B),2015.04 - 2018.03

  • Grant-in-Aid for Scientific Research(B),2011.04 - 2014.03

Other external funds procured 【 display / non-display

  • Magneto-strictive-driven dual AFM probe for narrow-gapped delivery in liquid,2015.04 - 2018.03,Magneto-strictive-driven dual AFM probe for narrow-gapped delivery in liquid

    Multi-atomic force microscopic (AFM) probe with imaging and other functions have been expected as molecular operation tools, in particular in biology research field. In this research, novel fabrication process technologies of sub-μm-gapped dual Si AFM probe with hollow-structure was established. Large deflectable twin cantilevers with high quality magneto-strictive thin film actuator was also developed for the function of dual cantilever switching.

    Japan Society for the Promotion of Science


Academic Activity 【 display / non-display

  • 電気学会, 2017.04 - 2020.03

  • 電気学会, 2017.12 - 2018.11

  • 電気学会, 2018.12 - 2019.11

  • 電気学会, 2018.12 - 2019.11

  • 電気学会, 2020.04 -

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